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Abstract
Simulations were performed on a free-standing thin film (two
opposing free surfaces) under a biaxial state of stress. Simulations were
run at two different temperatures and strain rates, for a perfect crystal
and for a film containing an internal void. The dependence of the stress-strain
behavior on temperature and strain rate was analyzed.
Introduction
Thin films have applications in optoelectronic devices as well
as coatings for structural materials. Thin films are usually deposited
on a substrate or they are part of more complex multi-layer systems. Therefore,
they are often under a state of stress caused by lattice mismatch or different
physical or mechanical properties from the substrate. The mechanical response
of the film under stress limits in many cases the performance and reliability
of the entire system.
Simulation
The system consists of 1200 particles of the same species in
a Lennard-Jones potential. The initial positions of the particles
describe a FCC monocrystal structure, with the (001) plane parallel to
the film surface and the [100] direction along the x-axys. Both the upper
and the lower surfaces of the film are free.
Constant Energy and Constant Volume-Temperature simulations are run
first to stabilize the structure. Then the pressure is brought to zero
to facilitate comparison among different simulations.
Constant strain rate is applied in the [100] and [101] directions.
Simulations are run at constant temperatures (0.12 and 0.42) using a Nose-Hoover
thermostat.
Same simulations are carried out for a film containing an initial internal
void (8 atoms) to study the influence of the defect on the stress-strain
behavior.
Data Analysis
The results of the simulation are shown to the left (Sim1 and
2). Effective stress and strain were calculated from the simulated
data and plotted as a function of temperature and strain rate.
At low temperature the film shears and yields. For the perfect crystal
increasing the strain rate from 0.001 to 0.005 did not affect much the
stress-strain behavior (Fig1). At high temperature the deformation is assisted
by the increased thermal vibration and the stress levels are lower. The
internal void causes earlier yielding at low temperature (Fig2). The evolution
in void size and shape during the straining can be observed in Sim2.
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